发明名称 Wafer bonding method
摘要 A method of coupling substrates together includes steps of providing first and second substrates. The second substrate includes a conductive bonding region positioned on its surface. Heat is provided to the conductive bonding region to reduce its number of defects. The surface of the conductive bonding region is bonded to the first substrate so that the conductive bonding region and the first substrate are coupled together.
申请公布号 US2005280042(A1) 申请公布日期 2005.12.22
申请号 US20050092498 申请日期 2005.03.29
申请人 LEE SANG-YUN 发明人 LEE SANG-YUN
分类号 H01L21/20;H01L21/30;H01L21/336;H01L21/46;H01L21/58;H01L23/48;H01L27/108;H01L27/148;(IPC1-7):H01L27/148 主分类号 H01L21/20
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