| 摘要 |
PROBLEM TO BE SOLVED: To provide a process for manufacturing an ink jet recording head having three or more level differences using photosensitive glass. SOLUTION: A part not protected by resist 16 is etched using blast, dry etching, or the like, to form a shallow recess 18 or an ink supply restriction part. When etching is carried out furthermore using hydrofluoric acid of 3-6% concentration, selective etching by acid progresses because only the part of a latent image 14A is crystallized selectively and a nozzle 20 is formed as a through hole. A fixed substrate 26 is stuck to the ink ejection surface of photosensitive glass 10 by an adhesive layer 24. It is then etched using hydrofluoric acid of 3-6% concentration to form a level difference becoming a chamber 22. The fixed substrate 26 is stripped from the photosensitive glass 10 and heat treated at 800°C. Since the photosensitive glass 10 is entirely rendered amorphous, a nozzle and a chamber exhibiting excellent physical properties and ink resistance can be obtained. COPYRIGHT: (C)2006,JPO&NCIPI
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