Method for the targeted deformation of an optical element

摘要

The invention relates to a method for the targeted deformation of an optical element, in particular a mirror that is positioned in an optical system. The optical element or a support element, on which the optical element is placed in such a way that forces acting on the support element cause a deformation of the optical element itself, are connected to a fixed structure indirectly by means of fixing elements or connecting members. The desired deformation of the optical element is achieved by a targeted variation of the fixing elements to modify the forces exerted in the fixing process on the optical element or the support element and/or the action of the moment of force and/or torque of the connecting members on the fixing elements.