发明名称 METHOD FOR DIAGNOSING STATUS OF BURN-IN APPARATUS
摘要 <p>In a method for diagnosing the status of a burn-in apparatus, a heater and a temperature sensor are brought into contact with various types of devices to be measured in a burn-in test, power consumption of the heater is controlled and the temperature of the device to be measured is adjusted to perform the burn-in test. When the device to be measured, the heater and the temperature sensor are in a noncontact status, the heater and the temperature sensor are arranged, and the temperature of a temperature control block with which a coolant is brought into contact is detected by the temperature sensor, and based on the detected results, whether the temperature sensor is normal or not is diagnosed.</p>
申请公布号 WO2005121823(A1) 申请公布日期 2005.12.22
申请号 WO2005JP10428 申请日期 2005.06.07
申请人 ADVANTEST CORPORATION;KITA, KAZUMI;KURASAWA, TADAHIRO 发明人 KITA, KAZUMI;KURASAWA, TADAHIRO
分类号 G01R31/28;G01R31/26;G01R31/30;G01R35/00;(IPC1-7):G01R31/26 主分类号 G01R31/28
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