| 摘要 |
PROBLEM TO BE SOLVED: To provide a pump device capable of improving a yield of a product, by improving durability of a shaft seal part, while maintaining purity of a transfer liquid high. SOLUTION: This pump device transfers an active liquid such as ultrapure water of extremely high purity in a manufacturing process of a semiconductor and a liquid crystal. The pump device has a pump casing 10 having a suction port 10a and a delivery port 10b, an impeller 14 stored inside the pump casing 10 and connected to a rotary shaft 22 of an electric motor 18, and a mechanical seal 50 for sealing a shaft between the seal and the rotary shaft 22. Anticorrosive processing is applied to a part contacting with the transfer liquid, and a pressure reducing chamber 44 is arranged between the impeller 14 and the mechanical seal 50. A discharge port 46 is arranged for discharging at least a part of the transfer liquid to the outside from the pressure reducing chamber 44. COPYRIGHT: (C)2006,JPO&NCIPI
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