| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid lubricating film which does not require film-forming processes for CVD, PVD, etc., does not require grinding for making a smooth surface, does not require an additional heating process, exhibits high lubricating property in high vacuum, and consists only of carbon. SOLUTION: A solid lubricant and the solid lubricating film for vacuum consist of diamond particles having an average particle size of <100 nm. The manufacturing method is provided for the solid lubricating film for vacuum, wherein a deposition film, essentially comprising <100 nm sized diamond particles, is formed on a frictional surface by a high-speed argon gas spraying method, a thermal spray method, or a volatile solvent applying method. COPYRIGHT: (C)2006,JPO&NCIPI |
