| 摘要 |
PROBLEM TO BE SOLVED: To provide a microswitch with low power consumption and high reliability in a state for holding a switch. SOLUTION: Beams 5 for a latch lying at both the adjacent sides of a thin-film heater 6 has a thermal insulation structure, a vertically movable complex 4 moves downward by applying an electrostatic sucking voltage between an electrode layer 7 and a lower substrate electrode 8 under a state electrified to the thin-film heater 6. When power supply to the thin-film heater 6 is stopped after contacting of a lower surface contact electrode 2 on an upper portion and a substrate contact electrode 3 on a lower portion, operation for returning to an original state is generated in the complex 4 that has been extended by heating, and the switch will be held even in a state that the application of the electrostatic sucking voltage is stopped. COPYRIGHT: (C)2006,JPO&NCIPI
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