| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal accelerometer device that allows acceleration sensing up to three axes. SOLUTION: The thermal accelerometer includes a substantially planar substrate 102, a cavity 103 formed in the substrate, a heater element 104, and at least first and second temperature sensing elements 106a and 106b. The heater element is suspended over the cavity, and the first and second temperature sensing elements are disposed along the X or Y axis in the substrate plane on opposite sides of and at equal distances from the heater element. The thermal accelerometer employs differential temperatures detected by the temperature sensing elements to provide indications of acceleration in the X or Y direction. Further, the thermal accelerometer employs a common mode temperature detected by the temperature sensing elements to provide an indication of acceleration along the Z-axis perpendicular to the X-axis and Y-axis. COPYRIGHT: (C)2006,JPO&NCIPI
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