| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical interference tomographic imaging device free from picture element alignment, by providing only one two-dimensional array sensor, capable of dispensing with a means for changing an optical path length, and capable of dispensing with an expensive liquid crystal shutter and a plurality of two-dimensional array sensors. SOLUTION: Array sensor elements 3 are alignedly arranged in every proper phase position of spatial periodλ<SB>S</SB>in a spatial interference fringe, in the spatial interference fringe of two beams 1, 2, a signal in every phase from the each array sensor 3 is detected to conduct computation mutually using electronic computation circuits 6-10 or the like, an interference signal intensity distribution of the two beams 1, 2 and a phase difference distribution are drawn to image a tomographic image of a surface or a deep layer of an inspected object, as same as an optical coherence tomographic imaging method. COPYRIGHT: (C)2006,JPO&NCIPI
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