| 摘要 |
PROBLEM TO BE SOLVED: To measure highly accurately the number and the size of fine particles such as dust, and to reduce assembly man-hours by enabling easy assembly of optical components. SOLUTION: This device has a constitution wherein laser light 21 from a light source 2 is converted into flat beam light 23 by a collimator lens 12 and a cylindrical lens 13, and the flat beam light 23 is transmitted crosswise through gas flowing between each nozzle 14a, 14b, so as to be transmitted through the whole section of the fluid in the crossing direction at that time. COPYRIGHT: (C)2006,JPO&NCIPI
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