| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic capacitance type pressure sensor capable of improving the accuracy and linearity of detection results more than before. SOLUTION: The electrostatic capacitance type pressure sensor 10 is provided with: a diaphragm 12 which deforms according to pressure; a fixed substrate 13 opposed to the diaphragm 12; an active electrode 14 for generating an active capacitance, an electrostatic capacitance which changes according to the deformation of the diaphragm 12; a reference electrode 15 for generating a reference capacitance, an approximately constant electrostatic capacitance even when the diaphragm 12 is deformed; and a guard electrode 16 for guarding against the occurrence of a floating capacitance between the active electrode 14 and the reference electrode 15. The active electrode 14, the reference electrode 15, and the guard electrode 16 are arranged on the fixed substrate 13. The guard electrode 16 is arranged between the active electrode 14 and the reference electrode 15. COPYRIGHT: (C)2006,JPO&NCIPI
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