| 摘要 |
PROBLEM TO BE SOLVED: To resolve the problem, wherein when an electron beam irradiation equipment suddenly stops during operation by an interlock function of the equipment, acceleration voltage jumps due to the timing difference of termination between the power source of the acceleration voltage and the power source for electron current, and consequently, causes parts damages. SOLUTION: A signal at the time of interlock breaks the electron current power source by way of a delay timer and the delay timer delays the termination of the electron current source and terminates the acceleration power source first. It can prevent voltage rise of the acceleration power source, so that it can apply to a scanning type and non-scanning type which prevent damage to power source, such as capacitors and rectifiers due to overvoltage. COPYRIGHT: (C)2006,JPO&NCIPI
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