| 摘要 |
PROBLEM TO BE SOLVED: To prevent an ozone concentration from being decreased while preventing the trouble due to the addition of a gaseous nitrogen when the ozone is generated by supplying a high-purity gaseous oxygen to a discharge type ozonizer. SOLUTION: A gaseous hydrocarbon and the gaseous nitrogen are compositely added to the high-purity gaseous oxygen when the high-purity gaseous oxygen is supplied to the ozonizer from an gaseous oxygen source. The addition amount of the gaseous nitrogen can be controlled to be 0.01% or less which does not cause the trouble and the addition amount of the gaseous hydrocarbon can be controlled to be 0.5% or less which is economical and has no problem of generation of moisture. The gaseous hydrocarbon is a gaseous methane typically. COPYRIGHT: (C)2006,JPO&NCIPI
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