PHOTO DETECTOR AND PHOTO DETECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a photo detector excellent in photo detection stability. SOLUTION: An infrared detector 100 is equipped with a silicon substrate 1, an infrared reflection film 15 provided near an upper surface of the silicon substrate 1, a diaphragm 4 as a light receiving part with a bolometer material thin film 6 provided above the silicon substrate 1 separated with an air gap 2 and a signal line 18 and the like for conduction to make the bolometer material thin film 6 and the infrared reflection film 15 have same electric potential. A conduction member can be provided independently from wiring in the silicon substrate 1 instead of the signal line 18 and the like. COPYRIGHT: (C)2006,JPO&NCIPI