发明名称 DEVICE AND METHOD FOR INSPECTING THE INTERNAL SURFACES OF HOLES
摘要 The invention relates to a device and a method for inspecting the internal surfaces of holes, recesses or the like. Said device (1) comprises a light source (3) for producing a light beam (4), said light beam (4) being focusable by means of a projection lens (7) and the focused light beam being directed onto the surface (9). A sensor device (11) is provided for detecting the reflected light beam (10). The aim of the invention is to provide a device which allows as rapid and easy a measurement as possible and which can be easily miniaturized. For this purpose, the light source (3) allows for production of a multicolor light beam (4) that is focused onto a plurality of points that are at different distances from the projection lens (7) due to chromatic aberrations of the projection lens (7). The distance to the surface (9) can be determined from the spectrum of the detected light beam (10).
申请公布号 WO2005121700(A1) 申请公布日期 2005.12.22
申请号 WO2005DE00914 申请日期 2005.05.17
申请人 MICRO-EPSILON MESSTECHNIK GMBH & CO. KG;MESSERSCHMIDT, BERNHARD;WISSPEINTNER, KARL 发明人 MESSERSCHMIDT, BERNHARD;WISSPEINTNER, KARL
分类号 G01B11/30 主分类号 G01B11/30
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