| 摘要 |
PROBLEM TO BE SOLVED: To provide a coater for a liquid material capable of easily controlling coating thickness, a coating method, a membrane formed using the device and the method, an electronic component provided with such a membrane and an electronic instrument. SOLUTION: The coater 1 has a coating head 2; a liquid material feed pipe 4 connected to the coating head 2; a liquid material tank 3 stored with the liquid material; a retaining part 5 for retaining a base material 7 to be coated; and a movement means 6 for moving the retaining part 5. The coater 1 delivers the liquid material from the coating head 2 and coats with the liquid material while relatively moving the base material 7 relative to the coating head 2. Further, the coater 1 has a temperature adjustment means for generating temperature difference between the base material 7 to be coated and the liquid material deposited on the base material 7 to be coated. The temperature adjustment means is constituted so as to adjust the temperature of the base material 7 to be coated and/or the liquid material. COPYRIGHT: (C)2006,JPO&NCIPI
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