发明名称 |
System and method to build, retrieve and track information in a knowledge database for trouble shooting purposes |
摘要 |
A method of building a problem troubleshooting database for use in a semiconductor manufacturing system includes storing semiconductor manufacturing problem data in a problem troubleshooting database; storing cause data in the problem troubleshooting database, the cause data being associated with respective problem data; storing solution data in the problem troubleshooting database, the solution data being associated with respective semiconductor manufacturing problem data and cause data; evaluating the effectiveness of the solution data; and updating the solution data with information with respect to the effectiveness determined in the evaluating step.
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申请公布号 |
US2005283498(A1) |
申请公布日期 |
2005.12.22 |
申请号 |
US20040873553 |
申请日期 |
2004.06.22 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
KUO WEN-CHANG;CHIANG TIEN-DER;HUANG CHIEN-CHUNG;LIN MU-TSANG;HUANG YI-LIN;CHEN CHUN-YI;WANG CHI |
分类号 |
G06F17/30;(IPC1-7):G06F17/30 |
主分类号 |
G06F17/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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