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发明名称
Verfahren zur Herstellung von Vorrichtung unter Benutzung eines strahlungsempfindlichen Resistmaterials
摘要
申请公布号
DE69832352(D1)
申请公布日期
2005.12.22
申请号
DE1998632352
申请日期
1998.09.29
申请人
LUCENT TECHNOLOGIES INC., MURRAY HILL
发明人
HOULIHAN, FRANCIS MICHAEL;WALLOW, THOMAS INGOLF;NALAMASU, OMKARAM
分类号
G03F7/004;G03F7/039;H01L21/027;(IPC1-7):G03F7/004
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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