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发明名称
END STATION OF ION IMPLANTER
摘要
申请公布号
KR20050120075(A)
申请公布日期
2005.12.22
申请号
KR20040045276
申请日期
2004.06.18
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
KWON, SOON TAK
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
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地址
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