发明名称
摘要 A semiconductor device including a semiconductor substrate, and a plurality of first interconnects formed over the semiconductor substrate. A first insulating layer covers the plurality of first interconnects, and a second insulating layer is formed between the plurality of first interconnects. The second insulating layer has substantially the same height as the plurality of first interconnects. An intermediate insulating layer is formed over the second insulating layer.
申请公布号 JP3729731(B2) 申请公布日期 2005.12.21
申请号 JP20000379004 申请日期 2000.12.13
申请人 发明人
分类号 H01L21/302;H01L21/3065;H01L21/316;H01L21/3205;H01L21/60;H01L21/768;H01L23/522;H01L23/532;(IPC1-7):H01L21/768;H01L21/306;H01L21/320 主分类号 H01L21/302
代理机构 代理人
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