| 摘要 |
PROBLEM TO BE SOLVED: To reduce the thrust resistance or disturbance of each of pressing magnets, by providing first and second pressing magnets for an X- and Y-stages and one-dimensionally arranging these magnets with rectangular magnet pieces brought into contact side by side. SOLUTION: An X-stage 4 movable in a stepping direction perpendicular to the scanning line along a guide on a surface board is disposed on a Y-stage 3 movable in the scanning direction on the board. The Y stage 3, and the X stage 4 have first and second pressing magnets 3e, 4e to attract stages 3, 4 to a surface board, and the magnets are arranged with rectangular magnet pieces brought into contact side by side in one-dimensional direction perpendicular to the scanning line. This reduces the thrust resistance and disturbance of the magnets. |
