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发明名称
PNEUMATIC CONTROL SYSTEM AND METHOD FOR SHAPING DEFORMABLE MIRRORS IN LITHOGRAPHIC PROJECTION SYSTEMS
摘要
申请公布号
EP1307777(B1)
申请公布日期
2005.12.21
申请号
EP20010959590
申请日期
2001.08.08
申请人
ASML HOLDING N.V.
发明人
GUZMAN, ANDREW, J.;LA FIANDRA, CARLO;SIDOR, RONALD, P.;IVALDI, JORGE, S.;NELSON, MICHAEL, L.
分类号
G02B26/08;G03F7/20;H01L21/027;(IPC1-7):G02B26/08
主分类号
G02B26/08
代理机构
代理人
主权项
地址
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