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发明名称
Method and device for controlling the edge of a disc shaped arcticle
摘要
申请公布号
EP1443542(A3)
申请公布日期
2005.12.21
申请号
EP20040001554
申请日期
2004.01.26
申请人
INFINEON TECHNOLOGIES AG
发明人
BINDER, ALFRED;KROUPA, GERHARD;VON KOBLINSKI, CARSTEN, DR.;MATSCHITSCH, MARTIN
分类号
H01L21/00;H01L21/68;H01L21/687;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
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