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发明名称
FURNACE APPARATUS
摘要
申请公布号
KR100539386(B1)
申请公布日期
2005.12.21
申请号
KR20040047954
申请日期
2004.06.25
申请人
CHO, JEONG HEE
发明人
CHO, JEONG HEE
分类号
H01L21/205;H01L21/22;(IPC1-7):H01L21/22
主分类号
H01L21/205
代理机构
代理人
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地址
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