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发明名称
LEAKY GUIDED-WAVE MODES USED IN INTERFEROMETRIC CONFOCAL MICROSCOPY TO MEASURE PROPERTIES OF TRENCHES
摘要
申请公布号
EP1606575(A2)
申请公布日期
2005.12.21
申请号
EP20040705634
申请日期
2004.01.27
申请人
ZETETIC INSTITUTE
发明人
HILL, HENRY, ALLEN
分类号
G01B9/04;A45D8/00;G02B17/08;G02B21/00;G02B27/10;(IPC1-7):G01B9/02
主分类号
G01B9/04
代理机构
代理人
主权项
地址
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