| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for controlling an actuator in which sensitivity of sensing is improved by utilizing nonlinear displacement characteristics of a clamping system. <P>SOLUTION: The method for controlling the actuator comprises steps of clamping the clamping system 19, in which stress displacement characteristics become nonlinear characteristics at an actuator part 2, and superposing a required detection voltage ΔV on a drive voltage V of the part 2 to be applied, thereby nonlinearly detecting stress changes occurring in the part 2 according to the voltage change of a sensor 3. <P>COPYRIGHT: (C)2003,JPO |
