| 摘要 |
PROBLEM TO BE SOLVED: To set the distribution of a microwave so that it is localized at a peripheral part, to flatten plasma distribution and to make uniform a deposition. SOLUTION: A rectangular waveguide 10 and a taper waveguide 13 are connected by a coaxial waveguide converter 12. Magnetic field coils 14 are arranged at the outer side of a taper waveguide 13 and a coaxial horn antenna 15 in a taper shape on an inner side. The coaxial horn antenna 15 is arranged in a state coaxial to the taper waveguide 13. One end of the coaxial horn antenna 15 is connected to the inner conductor of the coaxial waveguide converter 12. In such arrangement, the microwave is transmitted through the rectangular waveguide 10 at a TE11 mode, is converted into a coaxial TEM mode by the coaxial waveguide converter 12 and it is transmitted to a plasma generation chamber as it is. Thus, plasma 17 becomes a donut shape and the uniform deposition can be formed on a substrate 18. |
