Robotic wafer transport apparatus

摘要

A robotic transport apparatus capable of providing an effective waterproof function for working components in the system without using mechanical seals is disclosed. The robotic transport apparatus comprises: a robot body; an arm assembly extendably attached to the robot body; and a workpiece holding section attached to the arm assembly. A pan member for waterproof of the robot body is provided between the workpiece holding section and the robot body and has a projection area not smaller than the workpiece holding section.