| 发明名称 |
Combined on-axis and off-axis illumination |
| 摘要 |
The present invention describes an aperture comprising an opaque plate with a central opening and at least one peripheral opening and a method for combining an on-axis component and at least one off-axis component of illumination light.
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| 申请公布号 |
US6977387(B2) |
申请公布日期 |
2005.12.20 |
| 申请号 |
US20040794283 |
申请日期 |
2004.03.04 |
| 申请人 |
INTEL CORPORATION |
发明人 |
LEE THOMAS D. |
| 分类号 |
G02B5/00;G03F7/20;(IPC1-7):H01J37/09 |
主分类号 |
G02B5/00 |
| 代理机构 |
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