发明名称 Method of electroless introduction of interconnect structures
摘要 A method comprising introducing an interconnect structure in an opening through a dielectric over a contact point, and introducing a conductive shunt material through a chemically-induced oxidation-reduction reaction. A method comprising introducing an interconnect structure in an opening through a dielectric over a contact point, introducing a conductive shunt material having an oxidation number over an exposed surface of the interconnect structure, and reducing the oxidation number of the shunt. An apparatus comprising a substrate comprising a device having contact point, a dielectric layer overlying the device with an opening to the contact point, and an interconnect structure disposed in the opening comprising an interconnect material and a different conductive shunt material.
申请公布号 US6977224(B2) 申请公布日期 2005.12.20
申请号 US20000753256 申请日期 2000.12.28
申请人 INTEL CORPORATION 发明人 DUBIN VALERY M.;THOMAS CHRISTOPHER D.;MCGREGOR PAUL;DATTA MADHAV
分类号 H01L21/288;H01L21/768;H01L23/532;(IPC1-7):H01L21/44 主分类号 H01L21/288
代理机构 代理人
主权项
地址