发明名称 Method of designing wiring structure of semiconductor device and wiring structure designed accordingly
摘要 A wiring structure of a semiconductor device, includes a wiring layer formed on an insulating film, a width (W) of each wire in the wiring layer and a thickness (H) of the insulating film satisfying "W/H<1" a length (L) of each wiring in the wiring layer being equal to or longer than 1 mm.
申请公布号 US6978434(B1) 申请公布日期 2005.12.20
申请号 US20000602253 申请日期 2000.06.23
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SHIGYO NAOYUKI;YAMAGUCHI TETSUYA
分类号 H01L21/3205;G06F17/50;H01L21/82;H01L23/522;H01L29/06;H03K19/003;(IPC1-7):G06F17/50 主分类号 H01L21/3205
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