| 摘要 |
A charged particle beam control method and apparatus emit a charged particle beam from a charged particle gun, and then accelerate and guide the charged particle beam toward a surface of a sample to be irradiated using a primary column. The primary column controls the charged particle beam using a charged particle beam controlling element that has a cylindrical insulating base and a plurality of electrodes formed on an internal surface of the cylindrical insulating base. In addition, a portion of the internal surface of the cylindrical insulating base separates the plurality of electrodes electrically, and the internal surface of the cylindrical insulating base is not exposed to the charged particle beam.
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