| 发明名称 |
Polishing pad |
| 摘要 |
A polishing pad comprising a recessed portion in the non-polishing surface. This polishing pad can prevent the surface to be polished of an object from being scratched. |
| 申请公布号 |
US6976910(B2) |
申请公布日期 |
2005.12.20 |
| 申请号 |
US20040849782 |
申请日期 |
2004.05.21 |
| 申请人 |
JSR CORPORATION |
发明人 |
HOSAKA YUKIO;SHIHO HIROSHI;HASEGAWA KOU;KAWAHASHI NOBUO |
| 分类号 |
B24B37/00;B24B37/04;B24B37/20;B24B37/24;B24D3/00;B24D13/14;H01L21/304;(IPC1-7):B24D11/00 |
主分类号 |
B24B37/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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