发明名称 METHOD OF APPLYING DECORATIVE TITANIUM NITRIDE COATING FOR CERAMIC, METALLIC, GLASS, AND POLYMERIC ARTICLES
摘要 FIELD: ornamental finishing of articles. ^ SUBSTANCE: invention relates to applying thin-film coatings in vacuum. Method comprises attaching paper shield to article and placing the latter onto rotating table. Then follows ion purification of surface in vacuum (5.7-7.5).10-2 Pa at voltage 3.5-4.0 kV and ion current 50-100 mA for 10-15 min. Next operation is atomization of titanium cathode via arc vaporization accompanied by ion-plasma precipitation onto articles mounted on rotating table having zero potential against cathode. Arc sputtering of titanium is conducted in vacuum 8.7.10-2 Pa for 90-120 sec at ion current 90-130 A by atomization of titanium cathode. After that, nitrogen is introduced into chamber to deposit titanium nitride for 90-120 sec at ion current 90-130 A and in vacuum 7.5.10-2-1.5.10-1 Pa, which is selected in dependence on desired color of decorative coating. ^ EFFECT: simplified technology, improved quality of coatings, extended application area of method, in particular for articles of polymer materials. ^ 2 dwg, 1 tbl
申请公布号 RU2266351(C1) 申请公布日期 2005.12.20
申请号 RU20040118164 申请日期 2004.06.15
申请人 发明人 SHLEMIN A.V.;SHAMAEV E.P.;GRIDASOV A.P.
分类号 C23C14/32;C23C14/02;C23C14/04 主分类号 C23C14/32
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