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发明名称
含有含氟化合物之废气之处理方法及装置
摘要
一种含有含氟化合物之废气的处理方法,包括下述步骤:使含有含氟化合物之废气与在氧化铝–锆复合氧化物上载有氧化钨之金属触媒接触,然后使放出物与r–氧化铝触媒接触。
申请公布号
TW200539933
申请公布日期
2005.12.16
申请号
TW094126684
申请日期
2002.10.09
申请人
荏原制作所股份有限公司
发明人
森洋一
分类号
B01D53/86;B01J21/04;B01J23/30
主分类号
B01D53/86
代理机构
代理人
洪武雄;陈昭诚
主权项
地址
日本
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