发明名称 |
Optical position assessment apparatus and method |
摘要 |
An optical position assessment apparatus and method has an illumination system that supplies an alignment beam of radiation, and positional data is derived from reflections of the alignment beam. A substrate is supported on a substrate table and a projection system is used to project the alignment beam onto a target portion of the substrate. A positioning system causes relative movement between the substrate and the projection system. An array of lenses is arranged such that each lens in the array focuses a respective portion of the alignment beam onto a respective part of the target portion. An array of detectors is arranged such that each detector in the array detects light reflected from the substrate through a respective lens in the array and provides an output representative of the intensity of light reflected to it from the substrate through the respective lens. A processor is connected to the outputs of the detectors for deriving data representing the position of the lens array relative to the substrate from the outputs of the detectors.
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申请公布号 |
US2005275840(A1) |
申请公布日期 |
2005.12.15 |
申请号 |
US20040854770 |
申请日期 |
2004.05.27 |
申请人 |
GUI CHENG-QUN;BIJNEN FRANSISCUS G C;HOEFNAGELS JOHAN C G;DE JAGER PIETER W H;DE SMIT JOANNES T |
发明人 |
GUI CHENG-QUN;BIJNEN FRANSISCUS G.C.;HOEFNAGELS JOHAN C.G.;DE JAGER PIETER W.H.;DE SMIT JOANNES T. |
分类号 |
G01B11/00;G01B11/14;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G01B11/14 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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