发明名称 |
SYSTEMS AND METHODS FOR NANOWIRE GROWTH AND HARVESTING |
摘要 |
The present invention is directed to systems and methods for nanowire growth and harvesting. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial oriented nanowire growth using a combination of silicon precursors. In a further aspect of the invention, methods to improve nanowire quality through the use of sacrifical growth layers are provided. In another aspect of the invention, methods for transferring nanowires from one substrate to another substrate are provided.
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申请公布号 |
CA2564220(A1) |
申请公布日期 |
2005.12.15 |
申请号 |
CA20052564220 |
申请日期 |
2005.04.29 |
申请人 |
NANOSYS, INC. |
发明人 |
NIU, CHUNMING;MOSTARSHED, SHAHRIAR;GOLDMAN, JAY;DUAN, XIANGFENG;DUBROW, BOB;PAN, YAOLING;ROMANO, LINDA T.;STUMBO, DAVE |
分类号 |
H01L21/20;C01B31/02;C30B11/12;C30B29/60;H01L21/425 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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地址 |
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