MICRO-SAMPLE PREPARATION DEVICE, MICRO-SAMPLE INSTALLATION TOOL, AND MICRO-SAMPLE PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To enable sample preparation capable of shortening a time for preparing a micro-sample, having high reliability at the EDX analysis time, and having a clean processing surface competent for high power observation, concerning a sample preparation device enabling analysis or observation of a micro-region by extracting a fine sample from a parent sample by utilizing FIB. SOLUTION: This micro-sample installation tool 1a, 1b for fixing the micro-sample in the sample preparation device is made of a metal and has the mechanical strength by adjusting the thickness of the greater part to be 30-100μm, and a micro-sample fixing part 2a, 2b has a thin-walled structure having the thickness of 5μm or less and the height of 10μm or more. COPYRIGHT: (C)2006,JPO&NCIPI