ULTRASONIC TRANSDUCER AND METHOD FOR MANUFACTURING ULTRASONIC TRANSDUCER

摘要

PROBLEM TO BE SOLVED: To provide a ultrasonic transducer and a method for manufacturing the ultrasonic transducer capable of further enhancing an output voltage level and easily performing minute processing to be performed to a fixed electrode (lower electrode) required for the purpose in the ultrasonic transducer which performs band widening of frequency characteristics and enhances conversion efficiency of an electric signal and an acoustic wave signal by providing irregularity on the surface of the fixed electrode (lower electrode). SOLUTION: The ultrasonic transducer has a vibrating membrane in which an electrode layer is formed in an insulator and the fixed electrode in which a plurality of irregular parts are formed on the surface facing the vibrating membrane, generates ultrasonic waves by impressing an AC signal between the electrode layer formed in the vibrating membrane and the fixed electrode and is constituted by forming a groove part on the upper surface of a projected part of the irregular parts of the fixed electrode. COPYRIGHT: (C)2006,JPO&NCIPI