Cryopump with enhanced hydrogen pumping

摘要

This invention is a cryopump for enhanced removal of hydrogen from a vacuum environment. This is achieved through the use of a second stage made readily available to the gases being removed from the vacuum chamber. A plate that is part of the second stage is positioned with opening slots at an end of the stage near the chamber being evacuated. Extending outwardly from said slotted plate, are fins coated with charcoal. The charcoal tends to selectively deplete the hydrogen from gas being evacuated and the arrangement of the openings in the plate and the positioning of the fins readily permits and facilitates the movement of gas being treated across the fins where the hydrogen is readily removed.