| 摘要 |
A method of detecting a lift error of a piston used to elevate a wafer in a semiconductor manufacturing apparatus is disclosed. The method provides a time limit for a piston of a cylinder used to elevate a wafer to reach a specified position, a drive command is generated to drive the piston toward the specified position, a timer is started to measure a time period from the generation of the drive command, The piston detected whether it has reached the specified position, and an alarm and interlock signal are generated if the piston has not reached the specified position before the time period has exceeded the time limit.
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