Arrangement for positioning, holding, supporting or aligning workpieces or tools comprises a frame with magnets, units for influencing the field strength of the magnets, positional sensors, a control unit and deformation sensors

摘要

Arrangement comprises a frame (3) with magnets (4-9) whose magnetic field supports the working surface (2) of a table, units for influencing the field strength of the magnets, sensors (10, 11) for detecting the position and/or movement of the working surface of the table relative to a reference system and a control unit (16) and deformation sensors (12, 13). The arrangement further comprises piezoelectric, pneumatic or hydraulic actuators, which are arranged at locations where deformations of the take table occur.