METHOD OF MEASURING CONCENTRATION OF IMPURITY ELEMENT

摘要

A method of in SIMS (secondary ion mass spectrometry) using a raster variation method, shortening the standby time from setting of a sample in chamber to attainment of stabilization of secondary ion intensity. There is provided a method comprising making such an approximation that any difference between over-time changes of secondary ion intensities sequentially measured relative to two mutually different primary ion irradiation densities becomes constant, so that even when the secondary ion intensities change over time, there can be realized an accurate measuring of the concentration of impurity taking background noise into account.