| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical waveguide of a low PDL and a manufacturing method thereof. SOLUTION: The manufacturing method of the optical waveguide is characterized in manufacturing the optical waveguide 6 by forming a core layer of a material with a refractive index higher than that of a lower clad layer on the lower clad layer 2 of a substrate 1, next, forming a core 3b having an optical waveguide structure by etching the core layer, then, forming on the lower clad layer and the core a 1st upper clad layer 4 formed of a material whose reflow temperature is lower than that of the core, heating the 1st upper clad layer to reflow, and then forming a 2nd upper clad layer 5 on the 1st upper clad layer 4' after the reflow. COPYRIGHT: (C)2006,JPO&NCIPI |
