摘要 |
<P>PROBLEM TO BE SOLVED: To provide an element and its transfer method capable of transferring it by efficient energy transmission when selectively peeling the elements arrayed on a substrate using laser ablation technology. <P>SOLUTION: The laser ablation technology peels elements from a transfer substrate by radiating laser beam to an arbitrary element among the elements arrayed on the transfer substrate. The projection form of laser beam which is radiated is made similar to the form of elements arrayed on the transfer substrate. Since the projection form of laser beam is similar to the form of elements, the energy that the laser beam conveys is efficiently transmitted to the interface between the element and the transfer substrate. Since the corner of projection form of laser beam can be indefinite due to the effect of diffraction when the laser beam is refracted with an optical member such as a lens, the projection form of laser beam is preferred to be almost circular, with the form of element being preferred to be almost circular. <P>COPYRIGHT: (C)2006,JPO&NCIPI |