| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce sound waves of a transversal vibration mode with a simple configuration. <P>SOLUTION: The thin film bulk sound resonator comprises a laminate of a first electrode 3, a piezoelectric material layer 4 formed contiguously on the top of the first electrode 3, and a second electrode 10 formed contiguously on the top of the piezoelectric material layer 4. The first and second electrodes 3 and 10 of the part excluding areas of signal wiring 3a and 10a connected to the first and second electrodes 3 and 10 of the laminate have an interface with air. Also the planar shape of the piezoelectric material layer 4 of this part is made circular or regular polygonal. A notch 10a is provided from the circumference to the center on part of the second electrode 10. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
