| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electron beam with a pole piece projected into a plasma system in which the change in the magnetic properties of the pole piece can be suppressed even if being exposed to plasma, thus the trajectory of an electron beam can stably be kept. <P>SOLUTION: The electron gun 1 is equipped in a plasma system generating plasma, and comprises a pole piece 4 projecting into the plasma system, and the surface of the part 4A projecting into the plasma system of the pole piece 4 is coated with an insulator 5. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
