| 摘要 |
PROBLEM TO BE SOLVED: To properly detect a defect of a pixel cell drive circuit before completion as a semiconductor device, even if the ratio of wiring capacitors to pixel capacitors increases. SOLUTION: When a semiconductor device constituting a liquid crystal display is inspected, electric charges accumulated in pixel capacitors to be connected to a plurality of pixel switches selected from among all the pixel capacitors connected to one data line are read out of the same one data line, at the same time. Consequently, variations in the potential obtained on the data line can be made large. Then the potential variation obtained on the data line is amplified and outputted as a larger one, to be used for inspection. Consequently, potential variation, corresponding to a defective state of the pixel cell driving circuit, can be detected accurately in spite of a decrease in the ratio of pixel capacitors to wiring capacitors accompanying a smaller size or higher fineness of the liquid crystal display device. COPYRIGHT: (C)2006,JPO&NCIPI
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