SURFACE INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface inspection device capable of discriminating whether or not the irradiation detection position of a measuring object is shifted from a reference height even if the surface of the measuring object is coarse. SOLUTION: The surface inspection device comprises an optical system containing an irradiation optical system for irradiating a light from a light source on the surface of the measuring object, and a reception optical system for receiving scattering light reflected by the surface of the measuring object. The irradiation optical system comprises a multi-beam irradiation optical system for focusing and irradiating a multi-beam of which the irradiation light axes are parallel to each other toward the surface of the measuring object. A height direction shift quantity detection means comprises a light condensing optical system provided with photodetectors having parallel light axes and receiving individual multi-beams reflected by the surface of the measuring object. A processing means obtains a plane coordinate position at a reference height position of the irradiation detection position based on the difference between the light reception reference position and an actual light reception position of each photodetector when the irradiation detection position is supposed to be at the reference height position based on an analysis process result. COPYRIGHT: (C)2006,JPO&NCIPI