CAPACITANCE TYPE DYNAMIC QUANTITY SENSOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a capacitance type dynamic quantity sensor and its manufacturing method expected to effectively use a chip size and shorten design time. SOLUTION: By forming a plurality of through holes in part of beams and weights in the capacitance type dynamic quantity sensor, the time required for designing mechanical characteristics is shortened to facilitate designs for compact formation. COPYRIGHT: (C)2006,JPO&NCIPI